Mô tả sản phẩm:
Aluminum High Vacuum Angle Valve XLx |
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Series/CAD |
Actuation |
Shaft seal
system |
Valve
type |
Material |
Flange
size |
XLA |
Air
operated |
Bellows
seal |
Single
acting
(N.C.) |
Body:
Aluminum alloy
Bellows:
Stainless steel 316L |
16 to 80 |
XLAV
(With solenoid valve) |
XLC |
Double
acting |
XLCV
(With solenoid valve) |
XLF |
O-ring
seal |
Single
acting
(N.C.) |
Body:
Aluminum alloy |
16 to 160 |
XLFV
(With solenoid valve) |
XLG |
Double
acting |
16 to 80 |
XLGV
(With solenoid valve) |
XLD |
Bellows/
O-ring seal |
Single
acting
(N.C.) |
Body:
Aluminum alloy
Bellows:
Stainless steel 316L |
25 to 80 |
XLDV
(With solenoid valve) |
XLH |
Manual |
Bellows
seal |
Manual |
Body:
Aluminum alloy
Bellows:
Stainless steel 316L |
16 to 50 |
XLS |
Electromagnetic |
Pressure
balanced
bellow seal |
Single
acting
(N.C.) |
16, 25 |
Features |
- Strong against fluorine
- Minimal gas emissions
- Minimal heavy metal contamination
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Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ |
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Series/CAD |
Actuation |
Shaft seal
system |
Valve
type |
Material |
Flange
size |
XLAQ |
Air
operated |
Bellows
seal |
Single
acting
(N.C.) |
Body:
Aluminum
Bellows:
Stainless steel 316L |
16 to 50 |
XLDQ |
Bellows
seal
O-ring
seal |
40,50 |
Features |
- One-touch connection and release (no tool)
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Stainless Steel High Vacuum Angle/In-line Valve XM/XY |
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Note) Size 16 is not available for In-line type. |
Series/CAD
(Angle/In-line) |
Actuation |
Shaft seal
system |
Valve
type |
Material |
Flange
size |
XMA/XYA |
Air
operated |
Bellows
seal |
Single
acting
(N.C.) |
Body:
SCS13
(equivalent to
stainless steel 304)
Bellows:
Stainless steel 316L |
16 to 80Note) |
XMC/XYC |
Double
acting |
XMD/XYD |
Bellows/
O-ring
seal |
Single
acting
(N.C.) |
Body:
SCS13
(equivalent to
stainless steel 304)
Bellows:
Stainless steel 316L |
25 to 80 |
XMH/XYH |
Manual |
Bellows
seal |
Manual |
Body:
SCS13
(equivalent to
stainless steel 304)
Bellows:
Stainless steel 316L |
16 to 50Note) |
Features |
- All-in-one integrated structure with high-precision casting, no gas buildup
- Mounting interchangeable with Aluminum High Vacuum Angle Valve Series XL (Series XM)
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Series |
Type |
Features |
D Series |
Reed
auto switch |
General purpose |
Solid state
auto switch |
General purpose |
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High Vacuum Straight Solenoid Valve XSA |
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Series/CAD |
Valve type |
Fluid |
Piping |
Port size |
XSA |
Normally closed
direct acting 2
port solenoid valve |
Inert gas which protects the Stainless steel (equivalent to SUS405) from corrosion |
VCR®
Swagelok® |
1/4B, 3/8B |
Features |
- Solenoid valve with metal seal fittings (VCR®/Swagelok®)
- Dust reduction has been achieved through the use of non-rotating metal parts.
- Improved back pressure performance
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Series/CAD |
Valve type |
Fluid |
Piping |
Port size |
XVD |
Normally closed
(Open when pressured,
Spring seal) |
Nitrogen, Air,
Inert gas, etc. |
VCR®
Swagelok® |
1/4B |
Features |
- With the valve and needle valve all in one unit, takes up 1/4 the space of conventional models
- Major reduction in particles through the use of a metal diaphragm in the sheet portion
- The flow rate of both initial air supply and main air supply can be adjusted.
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Series/CAD |
Operating
pressure
range (Pa) |
Fluid |
Gate size
(Height x Width)
(mm) |
Operating
pressure
(MPa) |
XGT |
Atmospheric
pressure to
1x10-6 |
Inert gas type
vacuum |
32 x 222
46 x 236
50 x 336 |
0.45 to 0.6 |
Features |
- Suitable for use as a block disk between the load lock chamber and
transfer chamber, or the transfer chamber and process chamber, of
semiconductor equipment
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Rodless Cylinder for Vacuum CYV |
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Series/CAD |
Operating environment pressure [Pa (ABS)] |
Bore size (mm) |
CYV |
Atmosphere to
1.3x10-4 |
15,32 |
Features |
- Air cylinder for transfer in vacuum environments (1.3x10-4 Pa)
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